A new generation of devices for high-precision X-ray spectral analysis of nano- and micro-objects allows obtaining surface images in scanning electron microscopy mode (in secondary or reflected electrons), performing qualitative and quantitative elemental analysis, mapping the distribution of elements by area and concentration, identifying elements in residual quantities, studying the distribution by composition in reflected electrons, the chemical state of the element, and the type of mechanical bond.
Electron probe microanalyzers
Features
- The device has a higher registration angle of X-rays (52.5°), which is an important condition for improving its analytical characteristics, as it provides better spatial resolution, increased sensitivity due to lower X-ray absorption, and reduces absorption when analyzing the bottom of the recess or foreign matter in the recess (high-precision analysis of rough samples).
- The microanalyzer is characterized by maximum stability and reproducibility, and is a reference for microanalysis. Sensitivity during the analysis of some elements can reach tens of ppm.
- The built-in optical microscope with a magnification of approximately 540X, coaxial and confocal with an electron probe, allows you to simultaneously view the SEM image and the optical image, which carries information about the color of the sample.
- The use of high-performance Johanson analyzer crystals in the design helps to achieve perfect convergence without aberration.
- The device accommodates up to five 4-inch wave-dispersive spectrometers that cover the full spectral range.
- The CeB6 cathode (used in the EPMA-1720N) has a unique brightness value and an extended service life.
- Intuitive measurement control is suitable for both novice users and experienced users for complex analyses.
- The multi-window interface allows you to work in multitasking mode and present results in a convenient and detailed form, which increases the clarity of the results and the effect of their study.
- Does not require significant space for installation (the minimum room dimensions are 3.0 x 4.0 m).
